JPH02102720U - - Google Patents

Info

Publication number
JPH02102720U
JPH02102720U JP989889U JP989889U JPH02102720U JP H02102720 U JPH02102720 U JP H02102720U JP 989889 U JP989889 U JP 989889U JP 989889 U JP989889 U JP 989889U JP H02102720 U JPH02102720 U JP H02102720U
Authority
JP
Japan
Prior art keywords
detection device
pattern
optical system
pattern detection
slit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP989889U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP989889U priority Critical patent/JPH02102720U/ja
Publication of JPH02102720U publication Critical patent/JPH02102720U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
JP989889U 1989-02-01 1989-02-01 Pending JPH02102720U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP989889U JPH02102720U (en]) 1989-02-01 1989-02-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP989889U JPH02102720U (en]) 1989-02-01 1989-02-01

Publications (1)

Publication Number Publication Date
JPH02102720U true JPH02102720U (en]) 1990-08-15

Family

ID=31217049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP989889U Pending JPH02102720U (en]) 1989-02-01 1989-02-01

Country Status (1)

Country Link
JP (1) JPH02102720U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05175096A (ja) * 1991-12-26 1993-07-13 Hitachi Ltd 光投影露光装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05175096A (ja) * 1991-12-26 1993-07-13 Hitachi Ltd 光投影露光装置

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